- Qingqingquan
- Shandong
- 20 days
- 300 units per month
See why top fabs are switching to RO+EDI - 99.8% salt rejection, zero chemical waste, and 5x lower maintenance than ion exchange. Get the full report.
Semiconductor manufacturing "ultra-pure water upgrading war": RO + EDI technology complete guide
1. Semiconductor water "gold standard"
• Resistivity must be ≥ 18.2MΩ-cm (equivalent to the monomolecular layer of pollution)
• TOC content <1ppb (1000 times stricter than drinking water standards)
• Particle control: > 0.05μm particles need to be <1 / mL
2. The fatal defects of the traditional process
ion exchange resin:
• High treatment cost of regeneration waste liquid (40% of operating cost)
• Risk of particle contamination due to resin breakage
• Downtime for regeneration affects continuous production
Distillation method:
• Energy consumption up to 15-20kWh/m³.
• TOC of produced water is easy to exceed the standard (>5ppb)
3. The new generation of RO + EDI technical parameters
| Indicators | Traditional ion exchange | RO + EDI system |
|---|---|---|
| Resistivity | 16-17MΩ-cm stable | 18.2MΩ-cm |
| TOC control | 3-5ppb | ＜1ppb |
| Ton of water cost | $1.12−$1.40 | $0.42−$0.70 |
| Coverage of | 100 square meters | 60 square meters |
4. Practical case: Shanghai, a 12-inch wafer fab renovation
Before renovation:
• Use of mixed bed + polishing resin
• Average monthly cost of water treatment $99,995
• Product yield is affected by fluctuations in water quality
Transformation program:
• Three-stage RO + dual-channel EDI
• Configure online TOC monitor
• Intelligent regeneration control system
Retrofit effect:
✅ Water cost decreased by 32% (annual savings of $386,037)
✅ Yield increased by 0.8% (annual value-added of more than $2,800,097)
✅ Wastewater discharge reduced by 65%
5. 2024 Semiconductor Water Treatment Trends
Asia Capacity Expansion:
• 28 fabs under construction in China
• Southeast Asia semiconductor investment growth of 300%
Technology Iteration:
• Zero discharge (ZLD) systems become standardized
• Internet of Things remote monitoring penetration rate of more than 80
6. Three golden rules for system selection
Core equipment validation:
• RO membrane should pass certification
• EDI module life>5 years
Intelligent monitoring must:
• Real-time resistivity / TOC monitoring
• Early warning system response time <30 seconds
Expandability design:
• 20% capacity reserve
• Modularized structure for easy upgrade
